Tantalum (V) Ethoxide


Product #
Tantalum (V) Ethoxide
Tantalum ethanolate, ethanol, tantalum ethylate, tantalum pentaethoxide, pentaethoxy tantalum (V)
CAS Number
Molecular Weight
Color & Form
Colorless to yellow liquid
Boiling Point
145° C
Melting Point
21° C
Specific Gravity
Solubility in water
Reacts with water

Tantalum (V) Ethoxide – 50 g
Tantalum (V) Ethoxide – 10 g
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Information about Tantalum (V) Ethoxide / CAS 6074-84-6

C. S. Hwang and C. Y. Yoo (eds.), Atomic Layer Deposition for Semiconductors, Springer Science+Business Media New York 2014
DOI: 10.1007/978-1-4614-8054-9_1


Transportation Information
UN2924, Flammable liquids, corrosive, n.o.s., 3 (8), III (DOT)
Air Transportation Information
UN2924, Flammable liquid, corrosive, n.o.s., 3 (8), III (IATA)
  • Pictogram: Fire
  • Pictogram: Corrosive
Signal Word
Hazardous Statements
  • H226
    Flammable liquid and vapor.
  • H314
    Causes severe skin burns and eye damage.
Precautionary Phrases
  • P210
    Keep away from heat/sparks/open flames/hot surfaces. — No smoking.
  • P233
    Keep container tightly closed.
  • P240
    Ground/bond container and receiving equipment.
  • P241
    Use explosion-proof electrical/ventilating/lighting/.../equipment.
  • P242
    Use only non-sparking tools.
  • P243
    Take precautionary measures against static discharge.
  • P264
    Wash skin thoroughly after handling.
  • P280
    Wear protective gloves/protective clothing/eye protection/face protection.
  • P301+P330+P331
    IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.
  • P303+P361+P353
    IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower.
  • P304+P340
    IF INHALED: Remove victim to fresh air and Keep at rest in a position comfortable for breathing.
  • P305+P351+P338
    IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.
  • P310
    Immediately call a POISON CENTER or doctor/physician.
  • P363
    Wash contaminated clothing before reuse.
  • P370+P378
    In case of fire: Use ... for extinction.
  • P403+P233
    Store in a well-ventilated place. Keep container tightly closed.
  • P501
    Dispose of contents/container to.....
Detailed Safety and Handling Information can be found on our Safety Data Sheet (SDS).